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Single bundles of multiwalled carbon nanotube field emitters monolithically integrated with electron beam tailoring electrodes using silicon micromachining.

Nano and Micro Systems

Advances in nano- and micro-technologies drive development of electronics and sensors in our everyday lives, Earth and planetary exploration, industry, and defense.

In 2011, the Nano and Micro Systems Group focused on miniature system development activities for various customers, including NASA, DoD, and commercial entities. The group is continuing development of the following technologies: sample verification sensors; gate-integrated, high-current-density, carbon nanotube field emission sources; and advanced miniature tools for stereo imaging for medical uses and planetary exploration.

 
Current Projects
miniaturization-technologies

Miniaturization Technologies for Space Exploration
MDL is a participant in several collaborative technology development efforts for future space exploration.

 
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environment-microelectronics

Extreme Environment Microelectronics
Because of their inherent high-temperature tolerance and corrosion resistance, CNT-vacuum microelectronics opens up a new regime of in situ electronics.

 
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MEMS-SVS

MEMS Sample Verification Sensor System (SVS)
MDL has developed a system for the in situ mass measurement of planetary rock and soil samples…

 
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miniature-endoscope

Stereo Imaging Miniature Endoscope
MDL is collaborating to develop a novel stereo imaging miniature endoscope for minimally invasive surgeries and planetary exploration.

 
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MEX-instrument

Micro-extractor μEX Instrument
New compact technology will enable the identification and analysis of chemical signatures of life for future space missions.

 
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microcavities

Vacuum Packaging and Vacuum Gauging in MicroCavities
Miniaturization is often associated with creating high-vacuum microcavities…

 
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microgyroscopes

Navigational Grade Integrated MicroGyroscopes
The objective of the JPL MEMS gyroscope project is to build a high-accuracy, inexpensive, compact, lightweight, low-power gyroscope.

 
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ntj-ir-detectors

Antenna-coupled NTJ IR detectors for Hyperspectral Polarimetric FPA
MDL is working to develop and demonstrate proof-of-concept for novel antenna-coupled nano tunneling junction (NTJ)–based IR detectors…

 
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