Submillimeter Devices
DRIE Technology for the Fabrication of Submillimeter-Wave Components
Overview
JPL is using deep reactive ion etching (DRIE)-based silicon micromachining capabilities to develop the critical waveguide components at submillimeter wavelengths that will lead to highly integrated multipixel spectrometers, imagers, and radars. A silicon-based quadrature hybrid working in the 325–500-GHz range has been designed and initial fabrication is in progress.
Highlights (2008-2009)
Silicon micromachining was utilized to fabricate a quadrature hybrid at 325 GHz.
Current Projects
Compact Submillimeter Spectrometers
MDL is developing devices that could quantitatively determine the presence of water molecules for future missions to the outer planets.
(HEB)-based Mixers
(HEB)–based mixers enable detection of very faint signals, making them a valuable tool for astrophysics research.
Radiometer-On-A-Chip
A concerted effort is underway to develop technology that can allow us to build compact array receivers.
Micromachining of THz Components
Submillimeter heterodyne instruments play a critical role in addressing fundamental questions regarding the evolution of galaxies and interstellar clouds…
Solid-state Coherent Source
We have demonstrated a continuous wave (CW) coherent source covering 2.48–2.75 THz…
670 GHz Integrated Planar Mixers
JPL, in collaboration with Northrop Grumman, is developing planar GaAs-based mixers and multipliers…
Compact Submillimeter-Wave Sources
A two-chip power-combined tripler working across the 260–340-GHz band has been demonstrated…
Schottky Diode Mixers
GaAs planar Schottky diode mixers based on a membrane diode process have been used to make mixer topologies in the 400–600-GHz range…
SIS Receivers
MDL is developing SIS Receivers for the study of Global Atmospheric Chemistry…
DRIE Technology
JPL is using (DRIE)-based silicon micromachining for the fabrication of submillimeter-wave components…